Third M.I.T. Conference on Computational Fluid and Solid Mechanics June 14–17, 2005  

Application of fast multipole methods to the analysis of MEMS

A. Frangia, A. di Gioiab,*, G. Novatib
aDepartment of Structural Engineering, Politecnico of Milan, Piazza L. da Vinci 32, 20133, Milan, Italy
bDepartment of Structural and Mechanical Engineering, University of Trento, via Mesiano 77, 38050, Trento, Italy

  Full Text
The analysis of micro-electro-mechanical structures (MEMS) is addressed. Focus is set on the evaluation of damping forces exerted on moving parts through a fast multipole accelerated boundary element method (BEM) technique, assuming a rigid-body behaviour of the structural parts.

Keywords:  Boundary elements; Fast multipole; MEMS; Stokes flow; Unbounded domain; Dirichlet problem

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