Third M.I.T. Conference on Computational Fluid and Solid Mechanics June 14–17, 2005  

Reduced-order modeling of MEMS

Ali H. Nayfeha,* Mohammad I. Younisb, Eihab M. Abdel-Rahmana
aDepartment of Engineering Science and Mechanics, MC 0219, Virginia Polytechnic Institute and State University, Blacksburg, VA 24061, USA bMechanical Engineering Department, State University of New York at Binghamton, Binghamton, NY 13902, USA

  Full Text
We develop reduced-order models for microelectromechanical systems (MEMS) devices using the Galerkin procedure employing the mode shapes of their structural elements. The result is a finite set of nonlinear coupled ordinary-differential equations. These equations, in turn, are used to calculate the equilibrium configurations as well as the dynamics of the devices. We apply this methodology to MEMS made of microbeams and rectangular and circular microplates. We validate these models with available experimental results and numerical solutions of the full governing partial-differential equations and associated boundary conditions.

Keywords:  Reduced-order models; MEMS; Microbeams; Microplates

* Corresponding author: Tel.: +1 (540) 231 5453; Fax: +1 (540) 231 2290; E-mail: