ABSTRACT
We develop reduced-order models for microelectromechanical systems (MEMS) devices using the Galerkin procedure employing the mode shapes of their structural elements. The result is a finite set of nonlinear coupled ordinary-differential equations. These equations, in turn, are used to calculate the equilibrium configurations as well as the dynamics of the devices. We apply this methodology to MEMS made of microbeams and rectangular and circular microplates. We validate these models with available experimental results and numerical solutions of the full governing partial-differential equations and associated boundary conditions.